In this paper we describe the fabrication process and preliminary results of a CMOS compatible surface micromachined vertical accelerometer. The vertical accelerometer together with lateral one ...

The technology and application of current accelerometer-based devices in physical activity (PA) research allow the capture and storage or transmission of large volumes of raw acceleration signal data.

A fiber Bragg grating (FBG) accelerometer based on double diaphragms is presented and experimentally demonstrated. Design, fabrication, and optimization of the FBG accelerometer are analyzed.